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Parasitic effects depending on shape of spacer region on FinFETs
Kobayashi Yusuke
,
Tsutsui Kazuo
,
Kakushima Kuniyuki
,
Venkatnarayanan Hariharan
,
Rao Ramgopal V
,
Ahmet Parhat
,
Iwai Hiroshi
Published in IOP Publishing
2007
DOI:
10.1149/1.2728844
Volume: 6
Issue: 4
Topics:
Parasitic element
(65)%
65% related to the paper
,
Parasitic capacitance
(59)%
59% related to the paper
and
Capacitance
(56)%
56% related to the paper
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Parasitic effects depending on shape of spacer region on FinFETs
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Published in IOP Publishing
Open Access
yes
Impact factor
N/A
Authors (1)
Venkatnarayanan Hariharan
Electrical Engineering
(SoE) School of Engineering
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