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Parasitic effects depending on shape of spacer region on FinFETs
Kobayashi Yusuke, Tsutsui Kazuo, Kakushima Kuniyuki, , Rao Ramgopal V, Ahmet Parhat, Iwai Hiroshi
Published in IOP Publishing
2007
Volume: 6
   
Issue: 4
About the journal
Published in IOP Publishing
Open Access
yes
Impact factor
N/A