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Tracking electron-induced carbon contamination and cleaning of Ru surfaces by Auger electron spectroscopy
, M. Catalfano, S.S. Harilal, A. Hassanein, B. Rice
Published in
Volume: 30
Issue: 4
Extreme ultraviolet (EUV) radiation induced growth of carbon and oxygen desorption were investigated on a Ru surface by Auger electron spectroscopy (AES) in the presence and absence of additional photoelectrons (PEs) from a focusing Ru mirror. A decrease in EUV reflectivity with carbon growth in the presence of additional PEs has been observed. Conversely, a carbonaceous Ru surface was cleaned in sequential AES, and discussed in terms of secondary electron assisted dissociation of residual hydrocarbons and water molecules, followed by a chemical reaction between adsorbed carbon and oxygen atoms. © 2012 American Vacuum Society.
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