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Interconnect characterization: Joule displacement based laser profiling of periodic current carrying microconductors
, R. Nair, S. Kumar
Published in
Volume: 4746 II
Pages: 1006 - 1009
A non-contact, non-destructive technique for sensing the temperature of metal lines carrying alternating current is presented. The technique uses heterodyne laser probing, followed by measurements using lock-in amplifier. Predictions based on a developed theoretical model are in good agreement with experimental results.
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