The structural and magnetic properties of dilutely doped 3d elements in pulsed laser deposition (PLD) grown HfO 2 high-k dielectric thin films were studied. Monoclinc phase of HfO 2 was stabilized by Co- and Fe- substitution at significantly low growth temperature. High purity HfO 2, CoO and Fe 2O 3 powders were mixed throughly in the required ratio for 5mol% Co and Fe doping in HfO 2. The results from atomic force microscopy showed possible segregation of Fe 3O 4 phase in the form of nanoscale mounds.

Sankar Dhar

Physics

(SoNS) School of Natural Sciences

M.S.R. Rao

D.C. Kundaliya

C.A. Cardoso

A. Curtin

S.J. Welz

R. Erni

N.D. Browning

S.E. Lofland

C.J. Metting

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Shiv Nadar University

Materials Research Society Symposium Proceedings

Search for magnetism in Co and Fe-doped HfO 2 thin films for potential spintronic applications