We report on the search for ferromagnetism in undoped and cobalt-doped high- k dielectric Hf O2 films. Over a broad range of growth conditions, we do not observe ferromagnetism in undoped Hf O2 films. On the other hand, we do observe room temperature ferromagnetism in dilutely Co-doped Hf O2 films, but the origin of the same appears extrinsic (a Co rich surface layer) at least for the regime of growth conditions explored. © 2006 American Institute of Physics.